Micromachined Electromagnetic Generator

The generator uses the motion of a moving coil through a static magnetic field to induce a voltage across the coil. The basic design of the device is shown in figure 1. It consists of a discrete coil located within a micromachined silicon mass located at the end of a cantilever. The mass and coil are designed to vibrate laterally between 4 magnets located in capping layers. The magnetic circuit is designed to maximise the flux gradient across the coil and therefore the power generated.

Figure 1 - Micromachined electromagnetic generator design